Dimensional measurement of 3D microstruture based on white light interferometer
نویسندگان
چکیده
منابع مشابه
Dimensional measurement of 3D microstruture based on white light interferometer
Dimensional metrology for micro/nano structure is crucial for addressing quality issues and understanding the performance of micro-fabricated products and micro-fabrication processes. Most of the established methods are based on optical microscopy for planar dimensions and stylus profilometry for out-of-plane dimensions. Contact profilers suffer from slow speed of measurement for three-dimensio...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2007
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/48/1/265